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Measured equipment
CNC Contactless Image Measurement System | Stroke: X-axis 900mm | Y-axis 1200mm | Focussing Z-axis 200mm
Cubic element Coordinate Measuring Instrument | Measurement accuracy: 4+L/250um | Exploration Error: 4um MPMp
Cubic element Coordinate Measuring Instrument | Stroke: X-axis 500mm | Y-axis 600mm | Z-axis 400mm | Measurement accuracy: 2.8+L/250um MPEE | Exploration Error: 2.8um MPEp | Optics Resolution: 0.5um
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